Chapter 1604 Resolution Test

More than ten minutes later, Li Yabo followed Chang Haonan to the underground testing center again.

The double negative refractive flat lens was carefully mounted on a special protective platform.

"Teacher, what exactly is that important conjecture you mentioned?" Li Yabo couldn't help but ask.

Chang Haonan did not answer directly, but ordered:

"Yabo, go prepare a few things."

Li Yabo took out his notebook almost reflexively.

"A helium-neon laser with a wavelength of 632.8 nanometers, with stable power and pure mode; and," he paused and emphasized, "a resolution test target, with an accuracy requirement of... at least 11 groups of the third element or higher."

Li Yabo's heart skipped a beat.

The resolution test target mentioned by the other party undoubtedly refers to the product under the USAF 1951 standard.

The line/space width corresponding to 11 groups of 3 elements is 0.194 microns.

This has entered the sub-micron scale!

"Resolution test?"

He immediately understood Chang Haonan's intention, but then felt a strong sense of disbelief.

"Teacher, 632.8nm is visible red light, and the theoretical resolution limit is about... 316 nanometers. And our lens," he pointed to the chip on the protective table, "is so small, the equivalent numerical aperture can't be very high..."

Chang Haonan's expression was unusually calm, as if what Li Yabo said was just common sense and not an obstacle.

"This is the core of my conjecture," he explained. "The way negative refractive index materials manipulate electromagnetic fields is fundamentally different from traditional materials... It may not only be as simple as 'bending' light, but it may also... change the distribution pattern of the local field."

The air fell silent for a moment.

"Anyway, go get ready." About half a minute later, Chang Haonan continued, "After doing the experiment, I will know whether my guess is right or wrong... Theory is used for guidance, but in the end, experiment is the only criterion for testing the truth."

Li Yabo took a deep breath and quickly calmed down. His brain began to work rapidly, planning the experimental plan.

"The laboratory itself has a benchmark optical platform and standard parts for building optical path systems, but to conduct high-precision imaging resolution tests, some auxiliary equipment is also needed to ensure beam quality, eliminate vibration, accurately align, and conduct quantitative analysis."

He thought for a moment and began to make a list in his mind:

"For example, a high-precision beam collimation and expansion system, a rotating frosted glass diffuser, an adjustable neutral density filter, a precision aperture diaphragm... Most importantly, the entire system must be built on a top-level air-floating vibration-isolated optical platform, and a multi-axis translation stage with micron precision must be used to fine-tune the position of the sample and target..."

"..."

"Fortunately, they are all standard parts and can be purchased ready-made," Li Yabo concluded. "If we expedite it, it will arrive in about a week."

Then he added three more words: "It's just expensive."

"These are not a problem," Chang Haonan nodded. "Make a list of what needs to be purchased or transferred. I will attend a future information industry conference next week. It's a good opportunity to wait for me to come back after the meeting to see your experimental results."

He patted Li Yabo on the shoulder and said, "I believe you can build a reliable testing environment."

"Make sure to complete the mission!" Li Yabo straightened his back.

……

After Chang Haonan left, Li Yabo immediately went to the laboratory equipment.

Xie Xisen, director of the Equipment Department, is a kind-faced but frugal middle-aged man. When he saw the list of more than twenty items of equipment handed over by Li Yabo, his eyes widened instantly.

He took the list, ran his fingers over the lines, and couldn't help but let out a "hiss" sound from his mouth.

"Professor Li, it's not even April yet... You've... the funds you've spent this year are almost approaching 200 million, right?"

Xie Xisen raised his head and looked at Li Yabo half seriously and half jokingly:

"Now there is another big order, the budget will be at least tens of millions or even hundreds of millions."

Xie Xisen's tone was filled with the pain that is typical of an equipment manager, as well as his lament for the project team's spending money like water.

He also came from the National Key Laboratory of the Chinese Academy of Sciences. However, in less than three years since he came to the Torch Laboratory, the funding he signed out is an order of magnitude higher than the previous thirty years combined.

Li Yabo understood Director Xie’s “heartache”, but at the moment he only had that crucial experiment in his mind and was not in the mood to joke.

"Director Xie, this is the equipment Academician Chang specifically requested. All expenditures can be made through the funding channel for major projects. We will give priority to it and ensure it arrives as soon as possible." He paused and added, "Academician Chang wants to see the results in a week. Time is very tight."

Hearing "personally arranged by Academician Chang" and "core of major projects", Xie Xisen's expression instantly changed to a serious one.

"I understand. Give me the list and I'll monitor the progress myself." He didn't ask any more questions, picked up the list, and quickly sat down in front of the computer to start working.

Talk is talk, talk is fuss.

In Torch Lab, money is basically not the primary issue.

……

Four days later, Beijing Conference Center.

The China Future Information Industry Conference was held as scheduled.

Conferences of this level are attended by many bigwigs, and it is very likely that a few unintentional conversations will affect the direction of the industry in the next few years.

Therefore, many people will arrive early to see if they can find some opportunities.

In the VIP lounge, representatives from several leading domestic information industry companies were sitting together and talking in low voices.

In the relaxed atmosphere, there is a deep concern about the future and a subtle anxiety.

"The discussion on 5G standards R12 and R13 is heating up. Our voice in 3GPP has increased, but the real battle is still to come. The implementation of the standards and the large-scale deployment of terminals, base stations, and core network equipment will be the tough battle."

He Xin, vice president of Haisen Semiconductor, pushed up his glasses, his tone steady but urgent.

"That's right," said a senior executive from the telecommunications industry. "The development momentum of mobile Internet is unstoppable, and users' demands for bandwidth and latency are endless. This has directly triggered a hungry demand for high-performance, low-power, and highly integrated chips."

Another person agreed:

"In the next few years, the shipment volume and output value of consumer-grade chips may even surpass the industrial control field and become the absolute main force..."

"..."

The vast majority of domestic companies in the consumer electronics field do not have the power to set standards and cannot attend this meeting.

The few who attended were not in the semiconductor field.

Therefore, when the situation on the consumer side was mentioned, the atmosphere became a little dull.

Finally, He Xin took over the conversation:

"In terms of design, we are confident that we can match the most advanced international standards. But tape-out... is likely to encounter bottlenecks." He sighed, "We have contacted several major suppliers, but Samsung will definitely give priority to supplying itself. TSMC also has traditional customers, and they all directly stated that it is unlikely to squeeze out too much production capacity."

Then, he turned to Academician Wu Minghan, Technical Director of Huaxin International: "Academician Wu, the current situation... Huaxin may be the deciding factor."

Wu Minghan also looked somewhat helpless:

"Our current main production products are the domestically produced SMEE ArF-1500 and ASML's NXT:1950i... However, ArF1500 is limited by the light source and objective lens, and it is currently difficult to use it in advanced processes below 112.5nm."

He paused, and his tone became even lower:

"As for the NXT:1950i, the main problem is that the quantity is very small and the delivery cycle is not very stable..."

Someone interrupted:

"1950i...I think it was a model from around 08?"

Wu Minghan nodded:

"The newer model in this series is the NXT:2000, and of course there are the EUV product lines that have only been released in recent years, mainly the NXE:3300B... They are all in the process of procurement negotiations, but the situation... to be honest, it is not very optimistic."

Hearing the last four words, everyone's heart sank.

He Xin's tone became serious: "ASML is unwilling to sell?"

Wu Minghan shook his head, then nodded: "The Dutch didn't say it explicitly, but this is basically what they meant..."

"The negotiations for NXT:2000i are still going on. The price, delivery date, additional conditions... the other party is biting very hard. As for 3300B..." He smiled bitterly, "Let alone discussing the price, our negotiation team has not even been allowed to see the actual equipment 'with their own eyes'..."

Anyone who can sit in this place, even if they are all technical people, has the most basic sensitivity.

A chill crept up my spine.

Over the past decade, although theoretical sanctions still exist, thanks to its relationship with the EU, China can basically purchase the latest or second-newest products from ASML.

Now that ASML's attitude has taken a 180-degree turn, I'm afraid it's not just the Dutch's own intention, at least not just theirs.

He Xin opened his mouth and was about to ask more about the specific progress and yield of Huaxin International's breakthrough in 40nm and even 28nm process using multiple exposure technology, but suddenly he heard a slight but obvious commotion and surprised whispers coming from the side.

He raised his head and followed everyone's gaze towards the entrance of the venue.

There was a man in a well-fitting dark suit standing at the door, with his back to them, so their face couldn't be seen clearly.

But standing opposite that person was the organizer of today's conference, Director of the Industrial and Construction Committee Luan Wenjie!

Who could be the person with whom Director Luan could be so familiar and even talk in a somewhat intimate way?

Just as He Xin was puzzled, the man at the door seemed to end the conversation and turned slightly.

This also revealed his side face.

"Academician Chang Haonan?!"

He Xin blurted out, his voice full of surprise.

Today, the domestic semiconductor industry is in its early stages and relies heavily on the resources allocated to it by the Institute of Computing Technology and Sugon Group in the early years.

The person who is most open about this is Academician Li Jie, former chairman of the Dawning Group and director of the Institute of Computing Technology.

Those who are a little more inside will know that Chang Haonan also played an important role in this.

Therefore He Xin recognized it at first sight.

But still a little surprised.

He lowered his head and quickly flipped through the meeting agenda book in his hand, carefully reading it from beginning to end.

I indeed didn't see Chang Haonan's name.

"Academician Wu, is Academician Chang on the agenda?"

"No..." Wu Minghan also thought about it carefully, and then answered more confidently: "At least in the agenda I got, there is no arrangement for Academician Chang's report."