Chapter 1609: Academician Chang is too radical

Three days later, Torch Labs, underground testing center.

As soon as Chang Haonan stepped into the gate, he saw Li Yabo directing several engineers to build a complex optical platform in the central area.

The air was filled with the unique smell of n-hexane of new equipment, and a series of precision components reflected a cold luster under the light.

"Teacher, you're back!" Li Yabo looked up and saw Chang Haonan, and immediately stopped what he was doing and came forward to greet him.

His eyes were bright and he was obviously in good spirits.

Developing experimental plans and setting up equipment are both slow and meticulous tasks, and it is not worth staying up late and working overtime every day.

"Most of the hardware required for resolution testing has arrived, including air-floating vibration isolation table, high-precision translation stage, beam shaper, rotating frosted glass, ND filter..."

Before Chang Haonan asked about the progress, he pointed at the expensive equipment on the platform and reported quickly:

"And the USAF 1951 resolution target, with 11 groups and 3 elements. Although it is a standard part, there are too few people using it to find it in stock. It was expedited and airlifted here..."

"We are currently debugging the beam alignment and uniformity. It is estimated that it will take another two days to be fully ready..."

"..."

It took more than ten minutes to introduce a week's work.

Having the equipment in place is just the beginning of preparation, not the end.

"Thank you for your hard work." Chang Haonan glanced at the platform being built and nodded slightly. "The resolution test is not urgent in the next one or two days. Just proceed steadily according to the plan to ensure that the system is stable and reliable."

Then, he changed the subject and his tone became more clear:

"However, you need to prioritize preparing for another performance demonstration. Tomorrow morning, two very important partners will visit."

Li Yabo immediately understood: "Should we use the 'double negative refractive flat lens' for the basic demonstration?"

"Yes." Chang Haonan nodded. "Those who come here are experts. They can tell what's going on by just looking at the light path."

"Understood!" Li Yabo's expression became serious. "I will immediately recheck the demonstration system to ensure that there are no mistakes."

He knew that if the teacher paid so much attention to him, then the identity and weight of this "collaborator" must be very important.

……

The next morning, in the main building of Torch Laboratory.

Chang Haonan came to the door to greet him personally.

The side door of a minibus opened and Academician Wu Minghan got off first.

Following closely behind him was a middle-aged man who was short but had sharp eyes.

He also personally carried a black alloy suitcase that looked quite heavy and had a physical lock.

"Academician Chang!" Wu Minghan took two quick steps and shook hands with Chang Haonan enthusiastically.

Then he turned sideways and introduced: "This is Zhang Runing, a researcher from Changguang Group, and the person in charge of R&D of the objective lens system of the ArF series lithography machine."

"Researcher Zhang, welcome!" Chang Haonan extended his hand. "I've heard a lot about you. I'm Chang Haonan."

Zhang Runing transferred the suitcase to his left hand, and then extended his right hand to shake hands:

"You are too polite, Academician Chang. I should be the one to say that I have long heard of your great name."

As they were talking, the accompanying personnel got off the car one after another and stood a few steps behind.

The three of them exchanged pleasantries as they entered the room and took the elevator to the conference room on the top floor.

After sitting down, Zhang Runing went straight to the point without any unnecessary courtesy.

"Academician Chang, Academician Wu has conveyed your needs before." He patted the alloy box in his hand, making a dull sound, "This time, I brought the things that are most precious in the box."

As he spoke, he gestured behind him. Seeing this, the assistant immediately stepped forward and handed a key to Zhang Runing.

With a "click", the metal box opened.

Inside are several hard drives wrapped tightly with shock-proof materials.

And a thick file bag with the word "Top Secret" printed on the cover.

"These are several core catadioptric objective lens design solutions that Changguang has prepared for the next-generation domestic ArF immersion lithography machine 'ArF-1800' project."

Zhang Runing's tone was lightly proud and solemn.

Wu Minghan, who was sitting on the other side of Chang Haonan, spoke at the right time:

"Although we are still in the scheme demonstration stage and have not yet finalized which design route to adopt, it is no exaggeration to say that Lao Zhang's scheme represents the top level of domestic lithography lens design."

Zhang Runing smiled when he heard this.

But this time, he did not speak modestly.

Instead, he said half-jokingly and half-seriously:

"Academician Chang, if it weren't for the reputation of Torch Laboratory and your personal request, there would be no way these things could be taken out of Changguang."

In this situation, you need to show some confidence in your achievements.

Furthermore, excessive modesty is also disrespectful to other project participants.

Then, his tone returned to seriousness: "Also, although I brought it out, according to the regulations, I cannot copy it or take photos. After the demonstration and exchange, I must bring it back in its original state."

We are all technical personnel within the system, so we naturally know the rules.

Chang Haonan could also see that the other party was very serious about this, so he quickly responded:

"On behalf of the Torch Laboratory, I would like to express my gratitude to Researcher Zhang and Changguang Group for their sincerity!"

"Okay!" Zhang Runing nodded and looked relaxed.

Then he asked his assistant to connect one of the hard drives to the dedicated computer in the conference room:

"Then let's get started. Your new ideas may be able to interact with our plans."

The ArF-1800 project is the result of Changguang's hard work. It is benchmarked against ASML's NXT:2000i series and is the top product under the current DUV system.

He also wanted to see what new ideas the other party could come up with for discussion.

However, Chang Haonan gently waved his hand, signaling the assistant not to move:

"Researcher Zhang, don't rush to look at the information."

This attitude surprised the other two.

"The new concept of the Torch Lab is completely...subversive," Chang Haonan explained. "The existing design scheme itself may have limited reference value. The key lies in the idea, including the design method of the reciprocal system, as well as some key processes and data."

The smile on Zhang Runing's face froze slightly, and a barely perceptible hint of surprise and...unconvincedness flashed across his eyes.

Limited reference value?

What he brought was the core optical design solution that matches the world's top DUV lithography machines!

Academician Chang's tone is a bit too arrogant.

However, he did not show it, and just nodded: "Then we will follow the host's wishes and follow your arrangements, Academician Chang."

Chang Haonan also noticed the other party's little emotion, but he just stood up and made a gesture of invitation:

"You two, follow me."

Zhang Runing and Wu Minghan looked at each other and saw the confusion in each other's eyes.

The other party emphasized two people, which of course means that no accompanying personnel are allowed.

Fortunately, this is in China, so there is no need to worry about plots like five hundred swordsmen rushing out with the signal of smashing cups.

So the two of them left their entourage in the conference room and followed Chang Haonan alone into the underground testing center of the Torch Laboratory.

As soon as Zhang Runing stepped into the testing hall, his attention was attracted.

"This is... the latest three-dimensional coordinate measuring machine from Zeiss? Its accuracy can reach sub-micron level!"

He almost involuntarily walked towards a large device with a sophisticated shape and gleaming metallic luster, as if he had seen a rare treasure.

If there wasn't a window blocking it, I would have touched it with my hands.

"And this, the small-angle scattering device of the synchrotron radiation source..."

"Talysurf PRO+ Surface Profiler..."

"..."

Zhang Runing's tone was full of amazement.

“The investment in these devices is simply unimaginable!”

His research group was established early, and many of the equipment are no longer the latest models.

After all, Changguang Group is an enterprise and it has to consider the input-output ratio. It is impossible for it to pursue new models indefinitely.

Chang Haonan smiled slightly and did not stay here for long.

"Researcher Zhang is very knowledgeable. However, that is not the focus today."

He led the two of them straight to a relatively secluded corner of the testing center.

There was a rather "simple" looking optical path demonstrator.

The main body of the instrument is a black optical platform with a precision translation stage, on which a light source, several adjustment brackets and an observation port are fixed.

The control computer and monitor are connected next to the platform.

But the machine is turned off at this time.

Li Yabo had been waiting here for a long time.

Zhang Runing took a few quick steps and approached the optical pathmeter with interest.

He expected to see a set of experimental lens prototypes with complex structures and numerous lenses.

However, when he got closer, he found that there was only a single optical component fixed on the adjustment stand in the center of the optical platform.

A rectangular piece of paper with a thickness of several millimeters...

lens?

It is carefully clamped in a special fixture, and the surface is as flat as new.

But no matter how you look at it, it's just a flat mirror.

"Academician Chang, this is..." Zhang Runing looked at Chang Haonan in confusion, then at Wu Minghan who also had a bewildered look on his face.

He simply could not understand how this seemingly ordinary plane mirror could be connected to the "disruptive" design concept of lithography objectives.

Chang Haonan did not explain directly, but just nodded to Li Yabo: "Yabo, let's start."

"is teacher."

Li Yabo had already made all the settings, and now all he had to do was press the start button.

With a slight buzzing sound, a steady and thin green laser beam lit up.

At the same time, the heavy light shield around the optical path meter slowly rose and closed, shrouding the entire platform in darkness.

Only a few faint indicator lights on the control panel were on.

A few seconds later, Li Yabo nodded slightly, gave up the observation port and indicated that he was ready.

This speed is as fast as child's play.

Wu Minghan was more curious and was the first to put his forehead against the eyepiece of the observation port.

then……

Quiet.

silence.

Until a few seconds later.

"hiss--!"

An extremely suppressed yet unbelievable gasp suddenly came out of Wu Minghan's throat!

His whole body straightened instantly as if he was struck by an electric current. His forehead, which was pressed against the eyepiece, even tilted back slightly, and his mouth opened wide.

It was as if I had seen the most incredible magic!